a b c d e f g

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75. 0 50 100 150 200 250 300 350 400 450 500 z [nm] x [nm] d e f. SMP5 ‐ Experimental. SIM5_TIP5. SIM5. Roughness. SA2D. SMP1. 15.1. 1.31. SMP3. 22.1.
SMP5
‐
Experimental


d
 z
[nm]


z
[nm]


a


75
 60
 45
 30
 15
 0
 ‐15
 ‐30
 ‐45
 ‐60
 ‐75


75
 60
 45
 30
 15
 0
 ‐15
 ‐30
 ‐45
 ‐60
 ‐75
 0


200
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 x
[nm]


0


SIM5_TIP5


75


50
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 x
[nm]


75


b
60


e
60
 z
[nm]


45
 30
 15
 0
 ‐15
 ‐30
 ‐45
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 ‐75


z
[nm]


45
 30
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 ‐15
 ‐30
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 ‐60
 ‐75
 0


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 x
[nm]


0


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[nm]


0


50
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[nm]


SIM5


75


75


c
 60


f
 60


45
 30
 15
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 ‐15
 ‐30
 ‐45
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 ‐75


z
[nm]


z
[nm]


45
 30
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 ‐15
 ‐30
 ‐45
 ‐60
 ‐75


0


200
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 x
[nm]


g


Roughness


SA2D


Roughness


SA2D


SMP1


15.1


1.31


SMP3


22.1


SMP5


29.5


Roughness


SA2D



SIM1


16


1.6


SIM1_TIP5


15.9


1.25


1.38


SIM3


22


1.66


SIM3_TIP5


21.9


1.34


1.56


SIM5


30


1.98


SIM5_TIP5


29.8


1.5