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0.75 1.9x108 0.9 11 14 8.0x10-2 Hf-based gate dielectrics will first be introduced at 65nm in. 0.6 7.7x108 0.8 ... 0.5 1.9x104 0.7. 0.25 plished with ..... of Mass-Vac, Inc. 247 Rangeway Road - PO Box 359, North Billerica, MA 01862-0359 USA.