Effects of Substrate Temperature and Nitrogen ... - Chin. Phys. Lett

1 downloads 0 Views 215KB Size Report
the grain size increases from 48.8nm to 51.8nm. It demonstrates that the formation of AlN could possi- bly be enhanced by increasing the concentration of N2.
 

      

                         £             Æ         

               !" ##$

!     "#$ %   &  ' "(($ ) )                   ) *' +  ,                - .    &       % * )       &    *' +  /    Æ     #     .  0 )   )   "$       # %  /)- #    &    )                  % )  )- 1    )   ((Æ 2   %    )    (-( ,     + )   )       )  #' )         # %          

  %&  "%!  ""%" ' "" "  " "% !%() &")"%  &%&% "!* ' "! )' ' "% ) ! 

'&%" " '"%) +" + (  & $*    %!!"", -# .'   "%')  " ", /# 0'1     ')  %" !!*  2! &)), "! "%') 3& ! Æ "  $  -# 01 ! %, !')% " "" 4    -# 01* 5! &%&%"! '6 )  &%'!  " 4% &&)" !  " 7)! 4 '%)"% !   &" )"% ! ! ! )"% ),%!   " %" % "! !%" +) " '""%!   !%4 !" +   !* " )), ) 7)'! 

)! (  (8% ),%! 4% " &"3) %+"! 4 !   *   %% "    " &% 4%' ! 4 "! ! " &%&%" 4 ) 7)'! +"   9)", !  !& !()* %% "), %! " 9!  ( %&%" 4% " %+" 4 ) 7)'!  ) ') &% &!"

:  '") %   ') &% &!"

;:*  ;:*











 

      

5 &!" 4 ) 7)'! +! %%     ' '(% +"  %!) &%!!% 4  -# >* 5 3&%' ") !"& ! !+ !'")), 

 * -* 5 1% 3'% )!% 5!% 5 )'

"%#  A B@ '   # ! ()"  " ! "% ) %' "% " "      ) 4 B Æ +" "  % ,  !", 4 C0'   " &)! %&""

%" 4 ?* 5 "% " +! &%))) " " !(!"%"   " !"  ("+ "' +! '*  %% "  "% " %))   " '6 !% "  4%'", 4 ) 7)'! " "% "   " !(!"%"! +% % "" "  4%9 , 4 (" - ?* 5  !(!"%"! +% )  (, "    )) )"%!  ("! (4% &"  " " ' '(%* =4% & !"    "!  )!% &)!! +% ! " )

!%4 4 " "% "* 5 !"%"%)   '&!

                        ! "       #     $#% & ##'()*  &#'   + , #    -. #  ­

  

/

/   

" ) &%&%"! 4 ) 7)'! +% %"%? (, 3 %, 8%" : =:###   %"   A #- B '   %% "% !4%'  4%% 5 !&"%!&, )" 2D BE#   " !%4 '%&) , +% !" (, 7) '!! !

 )"% '%!&,  2; C2 " $##Æ    )+%  &%!!% ! '% 8" " '&% " %,!")) ",* 5% ! "  %" +& " " 3&) "! & '  *  " "%(" " " "  %! 4 8! ) " 4 ) "'!  " %+" !%4 "   !(!"%" "'&%"%   )+ '( "  &%!!%* % 4%"% !", 4 " ) 7)'! " % !? 4 ) 7)'! +! ))" (, %%%F! 9"   ! !+  5() -* " %' "'&%"% " % !?  %!! 4%' B@*@ ' " G* ' +) " &%!!% 4   %!! 4%'  -# > " >   " $##Æ  " % !?  %!! 4%' B@*@ ' " -*@ '* " ' !"%"! "" " 4%'" 4 ) ) &!! (), (    (,  %! "   "%" 4  &&%&%"), + !  !!" " +" 5  !" " ! !+   * /*

 

01   # 2#    34      34 )Æ ,   5     

 %!    ( !&), " : &""% ! 4 ) 7)'! &!" " %' "'&%"%   $##Æ   % 8% " '( "  &%!!% 4  -# > #*# > #* >   >* !  ( !  )) !'&)!   ),   !%& &6 "  A //- Æ %%!&   " ) -## %,!"))  % ""   " "" ) 7)'! +"   %,!"))  9)", +% ! !!4)), 4(%"   -## !(!"%"!* " %' "'&%"% "  " !", 4 : &6! ('! (" "% +  &%!!% %!! 4%'  -# > " >* 5!  "! "" " %,!"))  9)",  ( ' &% (,  %!  &%!!% " %' "'&% "% +  %! +" " %!)"  " )"%"%*  +% " !+! " (!" %,!")) ",  %  &%!

  !-1   #  2#   34       34  )Æ ,

!# (   6 #  2#     5             )Æ ,    

: ¢ (  :  :  : 

1     789 3  4   6 34 (+ ;; () :(; ( : " $##Æ * 5 5  !" " ! !+ "" )  ( ! % !"% "  (, "  %!   "%" 4  " %' "'&%"%* D 3&"), " !%4 '% &) , ('! % % +  &%!!%  %!!*

 =(> 9 ?  8@   @   A@  9 $@  #  A  A  9 ( / 1 @   B@ 7 8  B   C ( ,  7@  8 @  ! !@ 7 B @ C 8   , B  *      ()  0 @ E  @  E E@ E E@ ! 8 @ 8  7  E A 8 :       *: =+> 8  C@ F ? 8@ - @ . B  . 9 *     (*( =;> C C@ !? 8@  @ C   8 ( ! (