The application of spherical aberration correction and focal series ...

5 downloads 3180 Views 2MB Size Report
A JEOL 2200FS transmission electron microscope equipped with a field emission gun ... In this paper, preliminary results from the application of both techniques ...
Institute of Physics Publishing doi:10.1088/1742-6596/26/1/006

Journal of Physics: Conference Series 26 (2006) 25–28 EMAG–NANO 05: Imaging, Analysis and Fabrication on the Nanoscale

!

"#$! %&&'()%*(+,! +-! .&#$/()%'! %0$//%*(+,! )+//$)*(+,! %,1! -+)%'! .$/($.! /$.*+/%*(+,! *+! #(2#3/$.+'4*(+,! (5%2$.! +-! &'%*(,45!,%,+)%*%'6.*!&%/*()'$.! 7!8$/9$/%!:+,*%/1!;!73
"

#

%&'()*+&,* -. /(*&)0(12 340&,4& (,5 /&*(116)789 :,0;&)20*8 -. &+=)-?& 3*)&&*9 *W dJ&, (107,0,7 ( +04)-24-'& &\60''&5 ]0*J ( [QM &1&4*)-, 2-6)4&9 0* 02 50..0461* *- (22&22 *J& 5&.-462 (,5 (2*07+(*02+ -. (, 0+(7& =8 &8&W c,2*&(59 ]0*J *J& J&1' -. -,R10,& ')-4&220,79 5070*(1 50..)(4*-7)(+2 4(, =& (4\60)&5 0, *J& .-)+ -. ( B&+10, *(=1&(6W KJ& (=&))(*0-, 4-&..040&,*2 4(, *J&, =& +&(26)&5 (,5 4-+'&,2(*&5 aTbW X11 (=&))(*0-,2 6' *- *J0)5 -)5&) 4(, =& 4-))&4*&5 (,5 "# 4(, =& *6,&5 *- ( 5&20)&5 ;(16&9 ]J04J +(8 =& ,&7(*0;&W d0*J 4-+'6*&) (2202*&5 4-))&4*0-, (,5 (107,+&,*9 ( ,&7(*0;& ;(16& .-) "# -. R#Z !+ ](2 62&5 0, *J& ')&2&,* &E'&)0+&,*W KJ& )&(2-, .-) 4J--20,7 ( ,-,Rf&)- ;(16& 02 *]-.-15W [0)2*9 (* f&)"#9 34J&)f&) .-462 4-))&2'-,52 *- ( 5&.-462 -. f&)- (,5 (11 'J(2& 4-,*)(2* ]-615 *J&, =& &E'&4*&5 *- 502(''&()W 3&4-,59 0* 02 ,-* &(28 *- 4-+'&,2(*& .-) 2'J&)04(1 (=&))(*0-, &E(4*189 (,5 ( 2+(11 =6* .0,0*& ;(16& 02 &(20&) *- (4J0&;& _]0*J (, (446)(48 -. "TR!Z!+` *J(, ( ;(16& -. ')&402&18 f&)-W c, (550*0-,9 ,&7(*0;& "# ')-;05&2 ( ,&] 2'&40+&,R5&'&,5&,* 0+(70,7 +-5& _"# 02 '-20*0;& .-) 4-,;&)7&,* +(7,&*04 1&,2&2`9 ]J04J +(8 &,J(,4& 5&20)&5 4-,*)(2* agbW [076)& ! 2J-]2 (, &E(+'1& -. *J& 62& -. &,&)78R.01*&)&5 * '()*041&2 (* *]- 50..&)&,* 5&.-462 ;(16&2W KJ& 1(**04& .)0,7& 4-,*)(2* -. *J& 2+(11&) '()*041&9 ]J04J 02 " ,+ 0, 20f&9 02 J07J 70;&, *J(* 0* 02 26''-)*&5 -, 4()=-,W K]- -. *J& '()*041&2 ()& -)0&,*&5 41-2& *- *J& a! !Zb f-,& (E02 W

2!,5! O(24/$! LK! Q,&)78R.01*&)&5! HFKQ/ 0+(7&2 -. >* ,(,-'()*041&29 (4\60)&5 (* "ZZ?e (* *]50..&)&,* 5&.-462 ;(16&29 ]0*J * '()*041&9 0+(7&5 (* "ZZ?e ]0*J "# (5^62*&5 *- R#Z !+W KJ& 5&.-462 2*&' 20f& =&*]&&, 2644&220;& 0+(7&2 02 T ,+W [076)& #( 2J-]2 (, HFKQ/ 0+(7& -. *J& >* '()*041& 2J-], 0, .076)& "9 (4\60)&5 ]0*J "# (5^62*&5 *- R#Z !+W [076)& #= 2J-]2 ( )&2*-)&5 'J(2& 0+(7& -. *J& 2(+& '()*041&9 4(1461(*&5 .)-+ ( 5&.-462 2&)0&2 -. "Z 0+(7&2 (4\60)&5 ]0*J ( 5&.-462 2*&' -. T ,+W

a

#

5!,5!

O(24/$! MK _(` HFKQ/ 0+(7& -. *J& >* '()*041& 2J-], 0, .076)& "9 (* (, -'*0+6+ 5&.-462 (,5 ]0*J "# (5^62*&5 *- h#Z !+W _=` KJ& 2(+& '()*041& (.*&) (''180,7 K[RQdFW @&1-] *J& 0+(7&2 ()& '-]&) 2'&4*)(W

28

KJ& 0+')-;&+&,* 0, *J& 0,.-)+(*0-, 0, *J& 0+(7& 02 41&()W KJ& 4-,*)(2* .)-+ *J& 4()=-, 26''-)* .01+9 ]J04J 02 (* ( 50..&)&,* J&07J* *- *J& '()*041&9 J(2 =&&, 1()7&18 &10+0,(*&5 (.*&) K[RQdF9 (,5 *J& 7)('J0*04 '1(,&2 (,5 4()=-, (*-+2 41-2& *- *J& '()*041& ()& ,-] ;020=1&W %&*(012 -. *J& 26).(4& (*-+04 ())(,7&+&,* -, *J& '()*041& ()& (12- 41&()W >-]&) 2'&4*)( ()& 502'1(8&5 =&1-] &(4J 0+(7&W [-) *J& )&4-,2*)64*&5 0+(7&9 J07J&) 2'(*0(1 .)&\6&,40&2 ()& ')&2&,*9 (,5 *J& 4-,*)0=6*0-, *- *J& '-]&) 2'&4*)6+ .)-+ *J& (+-)'J-62 4()=-, J(2 5&4)&(2&5W * ,(,-'()*041&2 *J(* ()& ( .&] ,(,-+&*&)2 0, 20f&W X.*&) .-4(1 2&)0&2 )&2*-)(*0-,9 (*-+04 26).(4& ())(,7&+&,* -, *J& '()*041&2 4(, =& 2&&,W c, (550*0-,9 *J& 207,(1 *- ,-02& )(*0- 02 0+')-;&5 207,0.04(,*189 (,5 5&*(012 -. *J& 7)('J0*04 4()=-, 26''-)* 26))-6,50,7 *J& '()*041&2 =&4-+& ;020=1&W [6*6)& 2*650&2 ]011 0,;-1;& *J& (''104(*0-, -. "# 4-))&4*0-,9 .-4(1 2&)0&2 )&2*-)(*0-, (,5 J07JR(,71& (,,61() 5()? .0&15 *-+-7)('J8 *- *J& 2(+& '()*041&9 0, -)5&) *4J()(4*&)02& 0*2 *J)&&R50+&,20-,(1 (*-+04 ())(,7&+&,* (,5 2J('& .61189 (2 ]&11 (2 0*2 0,*&)(4*0-, ]0*J *J& 4()=-, 26''-)*W ! =$-$/$,)$.! a!b :)=(, C9 C(=062 @9 H(05&) / (,5 F-2& H !OOO %&!'()$*+,-!./$+,#$,01 QR!U"!RU"g a"b